RF 500W PID auto control temperature 1400c pecvd tube furnace for graphene

time:2022-09-18 04:24:33

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2021/08/10 · PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 500W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump..

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Brief Introduction: PT-T1200 PECVD is a is PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system which consists of 500W RF power supply, splitable tube.

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